MEMS Handlers—Air Pressure and Vacuum

 Test Under Vacuum/Pressure with Hot/Cold

	Fully enclosed Pressure test site Magazine input & output Handler control Chiller to -55° C Small footprint Design allows for multiple machines to be connected in-line
	Electrical test Pressure to 150 PSI Hot to 125° C Cold to -55° C
	Particle Interconnect test contacts

 Pressure Sensor Assembly I

	Accurate assembly of pressure sensors Camera alignment Tray input and output
	Camera 1 for device orientation Camera 2 for device alignment at assembly

 Pressure Sensor Assembly II

	Assemby and curing of pressure sensors Dual camera orientation and alignment Magazine/boat and bowl feeder input Magazine/boat output
	Camera 1 for device orientation at pickup Camera 2 (on pickup gantry) for device placement at assembly

 Pressure Sensor Inspection

	Camera inspection and repackaging of pressure sensors Tube/tray/boat input Tray/tape output
	Boats on tray carriage
	Four-device inverter