MEMS Handlers—Hot/Cold/Ambient Test

Below are handlers that Exatron has built to test various MEMS devices at ambient, cold, and hot temperatures.

The usual order of testing, and the recommended best practice, is to test with ambient or room temperature first, then cold, and hot last; so that the device is placed in the output at a slightly warm temperature that collects no frost.

  • Standard hot test to 155° C
  • Up to 300° C possible
  • -20° C with thermo-electric cooling
  • -55° C with fluid cooling

 Thermal Test Heads

  • Hot head on left
  • Cold head descending to test site
  • Ambient head on right
  • Underside of thermal heads with clear defrost-purge enclosures

 Thermal Temperatures Displayed

  • Hot test displayed at 126° C
  • Cold test displayed at -60.4° C
  • Preheat tray displayed at 125° C
  • Hot test sites displayed at 124° & 130° C
  • Cold test temperatures
  • Air pressure/vacuum testing

 Preheating Sites

  • Preheat tray for 40 devices
  • Thermal & magnetic testing


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